This equipment is the one to measure roughness, position, group width, distance and run-out simultaneously and is an automatic measurement equipment to measure roughness of objects and then to measure shape, etc. in regular sequence.

•Measuring Item : roughness, position, group width, distance and run-out
•Resolution : 0.1㎛
•Repeatability & Reproducibility : Not more than 10%
•Measuring Accuracy : ≤1.5㎛
•Repeatability : ≤1㎛